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Piezoelectric thin films on silicon for sensor application

Proceedings article published in 2013 by Corentin Jorel, Héloïse Colder, Didier Robbes, Alice Galdi, Laurence Mechin
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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Abstract

Poster ; International audience