In this letter, we propose a method to fabricate Fe80Ni20-O film with improved static and high-frequency, magnetic and electrical properties. Fe80Ni20-O alloy films were prepared by direct current magnetron sputtering at room temperature. The results show that the in-plane uniaxial magnetic anisotropy fields can be adjusted in a broad range by solely adding a very low dose of oxygen into Fe80Ni20 alloy films without applying any inducing field on substrates during deposition. By increasing the oxygen flow ratio from 0.75% to 3%. Fe80Ni20-O alloy films could be achieved with an adjustable ferromagnetic resonance frequencyf(r) (from 2.2 to 5.9 GHz), a large saturation magnetization 4 pi Ms (from 16.7 to 152 kG), and a high resistivity rho (from 56.7 to 108 mu Omega cm). (C) 2011 Elsevier B.V. All rights reserved. ; National Science Fund for Distinguished Young Scholars [50825101]; National Natural Science Foundation of China [50971108, 51171158]