IOP Publishing, Plasma Sources Science and Technology, 2(14), p. S60-S67, 2005
DOI: 10.1088/0963-0252/14/2/s08
Full text: Unavailable
Two electrical techniques that are frequently used to characterize radio frequency plasmas are described: current-voltage probes for plasma power input and compensated Langmuir probes for electron energy probability functions and other parameters. The following examples of the use of these techniques, sometimes in conjunction with other diagnostic methods, are presented: plasma source standardization, plasma system comparison, power efficiency, plasma modelling and complex processing plasma mechanisms.