Published in

IOP Publishing, Plasma Sources Science and Technology, 2(14), p. S60-S67, 2005

DOI: 10.1088/0963-0252/14/2/s08

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Electrical characterization of radio frequency discharges

Journal article published in 2005 by Cmo M. O. Mahony, Pd D. Maguire ORCID, Wg G. Graham
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Two electrical techniques that are frequently used to characterize radio frequency plasmas are described: current-voltage probes for plasma power input and compensated Langmuir probes for electron energy probability functions and other parameters. The following examples of the use of these techniques, sometimes in conjunction with other diagnostic methods, are presented: plasma source standardization, plasma system comparison, power efficiency, plasma modelling and complex processing plasma mechanisms.