2011 16th International Solid-State Sensors, Actuators and Microsystems Conference
DOI: 10.1109/transducers.2011.5969534
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We propose and demonstrate a novel one step method to integrate gold coated sensors with cartridges by dry covalent bonding. The cartridges are replica molded in an UV-curable off-stoichiometry thiol-ene (OSTE) polymer, featuring an excess of thiol functional groups that covalently bond to the surface of gold coated sensors upon contact. The method is demonstrated by the integration of a gold coated quartz crystal to a microfludic OSTE cartridge. The resulting bond interface is shown to be completely homogenous and void free and the package is tested successfully to a differential pressure of up to 2 bars. The performance of the biosensor chip is evaluated by measuring the unspecific binding of 0.5% albumin, resulting in a total frequency drop 205 Hz. This approach delivers a simple but rapid high quality integration aiming for the production of robust, low cost and disposable biosensor chips.