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2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2012.6170133

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Dry transfer bonding of porous silicon membranes to OSTE(+) polymer microfluidic devices

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This paper is available in a repository.

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Abstract

We present low temperature transfer bonding of porous silicon membranes to polymeric microfluidic devices, using neither adhesives nor bond surface treatment. The transfer is enabled by a novel dual cure ternary monomer system containing thiolene and epoxy. The ability of the epoxy to react with almost any dry substrate provides a very versatile fabrication method. We characterize the two stage curing mechanism, describe the device fabrication, and evaluate the bond strength.