Energy-saving is one of the world trends, energy-saving of chiller can reduce the operating costs, but also environmental protection can be achieved. The main purpose of this study is to evaluate Energy Saving of semiconductors chillers by using analytic hierarchy process (AHP). In the proposed model, the dimensions of science and technology industry for chillers energy saving have been taken from four perspectives derived, viz. man-made, machine, material and method. The proposed approach, therefore, links the industry and non-industry, tangible and intangible, internal and external factors, thus providing a holistic framework for the evaluation of an alternative for chillers energy saving. The Analytic Hierarchy Process (AHP)-based decision-making method can provide decision makers in related semiconductors administrators with a valuable reference for evaluating chillers energy saving to identify the most appropriate management. Therefore, through the AHP analysis is proposed in this paper can provide the decision makers in energy-saving program of chiller, make the enterprise can be more effective management.