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Heterodyne interferometer for in-plane and out-of-plane displacement measurements

Published in 2013 by H.-L.;Wang W-C.;Pan S-W. Hsieh
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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Postprint: policy unknown
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Abstract

An innovative interferometer based on the heterodyne interferometry, grating shearing interferometry, and Michelson interferometry for precise displacement measurement is proposed. The system configuration is simple and easy to set-up. A heterodyne light beam is generated by using an Electro-Optic Modulating (EOM) technique for amplitude modulation. While the heterodyne light beam normally passes through a semi-transmission diffraction grating, the reflection part (Michelson interferometry) for out-of-plane displacement detection and the diffraction part (Grating interferometry) for in-plane displacement detection can then be obtained. The experimental results demonstrate the system has the capability of providing two-dimensional displacement information simultaneously. The measurement resolution and range can achieve to nanometer and millimeter levels.