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Elsevier, Thin Solid Films, 20(516), p. 6804-6807

DOI: 10.1016/j.tsf.2007.12.007

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Si-nanocrystals/SiO2 thin films obtained by pyrolysis of sol gel precursors

This paper is available in a repository.
This paper is available in a repository.

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Abstract

Polymer pyrolysis to nanoceramics is employed for the production of photo-luminescent thin film samples, consisting of Si-nanocrystals dispersed in silica matrix. Thin films were deposited on Si wafer by spin-coating technique from a triethoxysilane-derived sol–gel solution. This is a fast process and a low cost technique. Samples were annealed at different temperatures between 600 °C and 1300 °C, under N2 gas atmosphere. Structural evolution and luminescence from Si-ncs vs. temperature were investigated by FT-IR absorption spectroscopy and photo-luminescence. Absorption spectrum of As-Prep sample shows several vibrational bands due to Si–H, C–Hx, and Si–O–Si structural units, without any appreciable luminescence. Silica phase segregation and intense PL (790 nm) due to Si-ncs were observed on annealing at T > 1000 °C.