The initial growth mode of indium tin oxide on glass was studied. An interesting transition from a 3D island growth mode at low temperatures to 2D growth at higher temperature was observed. This transition from the Volmer-Weber mechanism to the Frank-van der Merwe mechanism occurs at about 150°C. It coincides with the transition from amorphous to polycrystalline growth of the thin films. © 1996 American Institute of Physics.