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2006 European Solid-State Device Research Conference

DOI: 10.1109/essder.2006.307655

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A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing

This paper is available in a repository.
This paper is available in a repository.

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Abstract

This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy physics to X-ray detection for materials research and medical purposes. In this paper, the process integration is detailed and system trade-off considerations are reported.