2006 European Solid-State Device Research Conference
DOI: 10.1109/essder.2006.307655
Full text: Download
This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy physics to X-ray detection for materials research and medical purposes. In this paper, the process integration is detailed and system trade-off considerations are reported.