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TEM study of stacking faults and misfit dislocations in ZnSe/GaAs epilayers grown by molecular beam epitaxy

Journal article published in 1997 by Kwokkwong Fung, Ning Wang ORCID, Iamkeong Sou
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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Abstract

As-grown and post growth annealed pseudomorphic ZnSe epilayers grown on GaAs (001) by molecular beam epitaxy (MBE) in a single chamber have been studied by transmission electron microscopy (TEM). The density of stacking faults in as-grown layers can be reduced by three orders of magnitude when growth is initiated on a 2x3 reconstructed surface instead of the usual 2x1 reconstruction. There is also a correlation between the misfit dislocation configuration in post growth annealed pseudomorphic layers and the substrate reconstruction. Epilayers grown on 2x1 reconstructed substrate are dominated by zig-zag misfit dislocations deviating from the orthogonal directions while straight orthogonal misfit dislocations dominate in epilayers grown on 2x3 reconstructed substrate.