BexZn1-xO nanorod arrays with high crystalline quality were fabricated on Si substrate by a simple, low-cost hydrothermal method. The effect of Be-corporation on the structure, morphology and optical property of ZnO nanorod arrays was investigated. The diameter of BexZn1-xO nanorods gradually decreased and the length of them increased with increasing Be concentration. Edge emissions of the BexZn1-xO nanorods show a obvious blue shift upon the increase of the Be content. (C) 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim