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Trans Tech Publications, Materials Science Forum, (615-617), p. 49-52

DOI: 10.4028/www.scientific.net/msf.615-617.49

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Advances in Liquid Phase Conversion of (100) and (111) Oriented Si Wafers into Self-standing 3C-SiC

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

We report on recent advances in liquid phase epitaxial (LPE) conversion of a bulk Si wafer into self standing 3C-SiC. This includes the role of the stress control within the (100) oriented "crucibles", the elaboration of crack-free (111) "crucibles" and the successful conversion of (100) and (111) oriented Si wafer. To date up to 100 mu m thick 3C-SiC(100) as well as 30 mu m thick crack-free 3C-SiC (111) materials have been obtained. The growth rate ranges from 20 to 100 mu m/h and locally can even reach similar to 1mm/h. In this work we focus on the structural, morphological and optical properties of the LPE-grown material.