This investigation encompasses work in the development of TOF-SIMS methodology for the characterization of compounds formed during polymer surface modification. TOF-SIMS was used in this study in combination with selective derivatization reactions with hydroxyl group specific reagents. Derivatization techniques with group specific reagents provide a means of identifying functional groups in a complex matrix, along with significant enhancement of detection limits. The study proceeded in three steps. First, derivatives of organic compounds as a model compound were monitored to determine the suitability for detecting oxygenated species. Second, useful derivatization reactions were tested on functional groups in the synthetic polymer chains. Third, the methods thus developed were applied to polymer surfaces treated by plasma source ion implantation (PSII). 2-Fluoro-1-methylpyridinium derivatives were useful for characterization of organic alcohols and phenolic compounds. Analysis of organic compounds derivatized by these methods on polymeric materials demonstrated clearly that analysis in the presence of a carbonaceous matrix is possible. The results yielded evidence for the formation of hydroxyl species as the polymer is modified by PSII technique.