American Institute of Physics, Review of Scientific Instruments, 9(83), p. 093112
DOI: 10.1063/1.4754127
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The paper presents the development and demonstrates the capabilities of a new laboratory-based environmental X-ray photoelectron spectroscopy system incorporating an electrostatic lens and able to acquire spectra up to 0.4 Torr. The incorporation of a two-dimensional detector provides imaging capabilities and allows the acquisition of angle-resolved data in parallel mode over an angular range of 14° without tilting the sample. The sensitivity and energy resolution of the spectrometer have been investigated by analyzing a standard Ag foil both under high vacuum (10(-8) Torr) conditions and at elevated pressures of N(2) (0.4 Torr). The possibility of acquiring angle-resolved data at different pressures has been demonstrated by analyzing a silicon∕silicon dioxide (Si∕SiO(2)) sample. The collected angle-resolved spectra could be effectively used for the determination of the thickness of the native silicon oxide layer.