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IOP Publishing, Journal of Physics: Condensed Matter, 47(15), p. 8185-8193

DOI: 10.1088/0953-8984/15/47/021

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Deposition and characterization of Ga<sub>2</sub>Se<sub>3</sub>thin films prepared by a novel chemical close-spaced vapour transport technique

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Single-phase Ga2Se3 films have been deposited with a growth rate of about 30 nm min−1 on clean and Mo-coated soda-lime glass substrates by chemical close-spaced vapour transport. The use of HCl/H2 as a transport agent results in a stoichiometric volatilization of the binary Ga2Se3 powder source material and the growth of Ga2Se3 films with reproducible composition. The films have been characterized using x-ray diffraction measurements, scanning electron microscopy observations, energy dispersive x-ray analysis, x-ray fluorescence spectrometry and elastic recoil detection analysis. A p-type conductivity was determined by means of the thermoelectric probe method. A Ga2Se3 band gap energy Eg = 2.56 eV has been found by optical measurements.