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Donaton et al., 2000
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[lirias.kuleuven.be]
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@misc{Donaton2000, abstract = {status: published}, author = {Donaton, R. A. and Coenegrachts, Bart and Sleeckx, Erik and Schaekers, Marc and Sophie, Guus and Matsuki, N. and Bakklanov, M. R. and Beyer, Gerald and Struyf, Herbert and Vanhaelemeersch, Serge and Stucchi, Michele and De Roest, David; U0010705 and Maex, Karen; U0007497;}, month = {jan}, title = {Characterization and integration in Cu damascene structures of aurora, an in-organic low-k dielectric}, year = {2000} }
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Characterization and integration in Cu damascene structures of aurora, an in-organic low-k dielectric
Published in 2000 by
R. A. Donaton
,
Bart Coenegrachts
,
Erik Sleeckx
,
Marc Schaekers
,
Guus Sophie
,
N. Matsuki
,
M. R. Bakklanov
,
Gerald Beyer
,
Herbert Struyf
,
Serge Vanhaelemeersch
,
Michele Stucchi
,
David; U0010705 De Roest
,
Karen; U0007497; Maex
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Abstract
status: published