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Kaushik, 2006
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@inproceedings{Kaushik2006, abstract = {status: published}, author = {Kaushik, Vidya; Deweerd W.; Rohr Erika; Hyun S.; Aoulaiche Marc; U0047036; Degraeve Robin; De Gendt Stefan; U0043564; Houssa Michel; Heyns Marc; U0011193; JLA}, month = {jan}, title = {Engineering of ALD Hf-silicates for low standby power applications}, year = {2006} }
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Engineering of ALD Hf-silicates for low standby power applications
Proceedings article published in 2006 by
Vidya; Deweerd W.; Rohr Erika; Hyun S.; Aoulaiche Marc; U0047036; Degraeve Robin; De Gendt Stefan; U0043564; Houssa Michel; Heyns Marc; U0011193; JLA Kaushik
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Abstract
status: published