Published in

The Electrochemical Society, ECS Transactions, 29(45), p. 139-142, 2013

DOI: 10.1149/04529.0139ecst

Links

Tools

Export citation

Search in Google Scholar

Thin-film materials for solid-state rechargeable lithium batteries

This paper is available in a repository.
This paper is available in a repository.

Full text: Download

Green circle
Preprint: archiving allowed
Green circle
Postprint: archiving allowed
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO

Abstract

Thin-film materials for solid-state rechargeable lithium batteries were fabricated by physical vapor deposition. The cathode is a lithium cobalt oxide (LiCoO2) film, separated from the anode (metallic lithium) by an electrolyte of lithium phosphorus oxynitride (LiPON). The LiCoO2 was deposited by RF sputtering, annealed after deposition and x-ray diffraction patterns showed higher crystallinity with 2 hours of annealing in vacuum with a temperature of 650 ºC. LiPON was deposited by reactive RF sputtering (nitrogen) and metallic lithium by thermal evaporation. Ionic conductivity of LiPON films was measured at room temperature of 26 ºC and 6.3x10E7 S.cm-1 obtained. Electrical resistivity of a 3 µm thickness lithium film was 7.6x10E8 §Ù.m, measured during deposition.