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Nag et al., 2013
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@inproceedings{Nag2013, abstract = {status: published}, author = {Nag, Manoj and Steudel, Soeren and Vaisman Chasin, Adrian; U0073379 and Myny, Kris and Rockele, Maarten; U0064489 and Bhoolokam, Ajay and Willegems, Myriam and Smout, Steve and Vicca, Peter and Ameys, Marc and Schols, Sarah and Genoe, Jan; U0004269 and Groeseneken, Guido; U0019193 and Heremans, Paul; U0010424}, month = {jan}, title = {Back-channel-etch process flow for a-IGZO TFTs}, year = {2013} }
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Back-channel-etch process flow for a-IGZO TFTs
Proceedings article published in 2013 by
Manoj Nag
,
Soeren Steudel
,
Adrian; U0073379 Vaisman Chasin
,
Kris Myny
,
Maarten; U0064489 Rockele
,
Ajay Bhoolokam
,
Myriam Willegems
,
Steve Smout
,
Peter Vicca
,
Marc Ameys
,
Sarah Schols
,
Jan; U0004269 Genoe
,
Guido; U0019193 Groeseneken
,
Paul; U0010424 Heremans
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Abstract
status: published