Published in
IOP Publishing, IOP Conference Series: Materials Science and Engineering, (41), p. 012019, 2012
DOI: 10.1088/1757-899x/41/1/012019
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Internal Photoemission at Interaces of ALD TaiOxInsulating Layers Deposited on Si, InP and In0.53Ga0.47As
Journal article published in 2012 by
H. Y. Chou,
V. V. Afanas'ev,
N. H. Thoan,
C. Adelmann,
H. C. Lin,
M. Houssa 
,
A. Stesmans
,
A. Stesmans
This paper is made freely available by the publisher.
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status: published