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IOP Publishing, Plasma Physics and Controlled Fusion, 12(51), p. 124034, 2009

DOI: 10.1088/0741-3335/51/12/124034

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Numerical simulation of hydrocarbon plasmas for nanoparticle formation and the growth of nanostructured thin films

Journal article published in 2009 by Erik Neyts ORCID, Maxie Eckert, Ming Mao, Annemie Bogaerts ORCID
This paper is available in a repository.
This paper is available in a repository.

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Abstract

This paper outlines two different numerical simulation approaches, carried out by our group, used for describing hydrocarbon plasmas in their applications for either nanoparticle formation in the plasma or the growth of nanostructured thin films, such as nanocrystalline diamond (NCD). A plasma model based on the fluid approach is utilized to study the initial mechanisms giving rise to nanoparticle formation in an acetylene plasma. The growth of NCD is investigated by molecular dynamics simulations, describing the interaction of the hydrocarbon species with a substrate.