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Elsevier, Thin Solid Films, (541), p. 36-40

DOI: 10.1016/j.tsf.2012.11.116

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Synchrotron X-ray diffraction analysis for quantitative defect evaluation in GaP/Si nanolayers

This paper is available in a repository.
This paper is available in a repository.

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Abstract

In the context of III-V monolithic integration on silicon, synchrotron X-ray diffraction has been employed in this study using a bi-dimensional large area hybrid pixel detector (XPAD third generation) to characterize defects in the GaP layers. Despite a very coherent interface (low plastic relaxation) of GaP/Si, 2 types of defect are detected. Micro-twins contributions are evidenced and quantitatively evaluated from additional reflections analysis. Antiphase domains are evidenced using the Williamson-Hall-like plot method applied to transverse scans extracted directly from single XPAD images taken on specular GaP reflections.