Monolithic and heterogeneous three-dimensional integration of two-dimensional materials with high-density vias
Journal article published in 2024 by
Subir Ghosh 
,
Yikai Zheng ,
Zhiyu Zhang ,
Yongwen Sun ,
Thomas F. Schranghamer ,
Najam U. Sakib,
Aaryan Oberoi ,
Chen Chen,
Joan M. Redwing ,
Yang Yang ,
Saptarshi Das
,
Yikai Zheng ,
Zhiyu Zhang ,
Yongwen Sun ,
Thomas F. Schranghamer ,
Najam U. Sakib,
Aaryan Oberoi ,
Chen Chen,
Joan M. Redwing ,
Yang Yang ,
Saptarshi Das
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