The rise of the Internet of things has catalyzed extensive research in the realm of flexible wearable sensors. In comparison with conventional sensor power supply methods that are reliant on external sources, self-powered sensors offer notable advantages in wearable comfort, device structure, and functional expansion. The energy-harvesting modes dominated by piezoelectric nanogenerators (PENGs), triboelectric nanogenerators (TENGs), and pyroelectric nanogenerators (PyENGs) create more possibilities for flexible self-powered sensors. This paper meticulously examines the progress in flexible self-powered devices harnessing TENG, PENG, and PyENG technologies and highlights the evolution of these sensors concerning the material selection, pioneering manufacturing techniques, and device architecture. It also focuses on the research progress of sensors with composite power generation modes. By amalgamating pivotal discoveries and emerging trends, this review not only furnishes a comprehensive portrayal of the present landscape but also accentuates avenues for future research and the application of flexible self-powered sensor technology.