Published in
American Institute of Physics, AIP Conference Proceedings, 2023
DOI: 10.1063/5.0136670
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Dependence of the 6H - SiC induced amorphization on the ion beam implanted fluence
Proceedings article published in 2023 by
Marko Erich,
Marko Gloginjić,
Željko Mravik 
,
Branislav Vrban,
Štefan Čerba,
Jakub Lüley,
Vladimír Nečas,
Vendula Filová,
Karel Katovský,
Ondrej Štastný,
Srdjan Petrović
,
Branislav Vrban,
Štefan Čerba,
Jakub Lüley,
Vladimír Nečas,
Vendula Filová,
Karel Katovský,
Ondrej Štastný,
Srdjan Petrović
This paper was not found in any repository, but could be made available legally by the author.
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