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Published in

American Institute of Physics, Journal of Vacuum Science and Technology A, 5(41), 2023

DOI: 10.1116/6.0002884

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Vertical NiO/β-Ga2O3 rectifiers grown by metalorganic chemical vapor deposition

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

The performance of vertical Schottky and NiO/β-Ga2O3 p-n heterojunction rectifiers in which the Ga2O3 was grown by metalorganic chemical vapor deposition (MOCVD) is reported. The Si-doped Ga2O3 drift layers employed in the study had a doping concentration of 7.6 × 1015 cm−3 with a thickness of approximately 6 μm. High-angle annular dark-field scanning transmission electron microscopy imaging revealed an absence of interfacial features or extended defects around the drift layer region, indicating that MOCVD provides high-quality β-Ga2O3 epitaxial films for fabrication of vertical rectifiers. Both Schottky and NiO/Ga2O3 p-n heterojunction rectifiers attained the highest reported breakdown voltage of 486 and 836 V, respectively, for this growth technique. The heterojunction rectifiers showed an on/off ratio surpassing 109 within the voltage range of 0 to −100 V. Additionally, the Schottky barrier diodes demonstrate an on/off ratio of up to 2.3 × 106 over the same voltage range. These findings highlight the promise of MOCVD as a growth method for the type of rectifiers needed in power converters associated with an electric vehicle charging infrastructure.