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Dissemin
Jan Vanfleteren
Capon et al., 1992
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@article{Capon1992, author = {Capon, J. and De Baets, J. and De Rycke, I. and De Smet, H. and Demolder, S. and Doutreloigne, J. and Nachtergaele, G. and Van Calster, A. and Vanfleteren, J.}, month = {jan}, title = {Silicon oxynitride layers for device passivation}, year = {1992} }
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Silicon oxynitride layers for device passivation
Journal article published in 1992 by
J. Capon
,
J. De Baets
,
I. De Rycke
,
H. De Smet
,
S. Demolder
,
J. Doutreloigne
,
G. Nachtergaele
,
A. Van Calster
,
J. Vanfleteren
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