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Karlsruher Institut für Technologie (KIT), 2021

DOI: 10.5445/ir/1000135526

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Fast Determination of the Thickness of Electron-Transparent Specimens using Quantitative STEM-in-SEM and Monte-Carlo Simulations

Journal article published in 2021 by Katharina Adrion, Milena Hugenschmidt ORCID, Erich Müller, Dagmar Gerthsen
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Accurate values for the thickness of electron-transparent specimens in electron microscopy are of general interest, e.g. as a parameter for quantitative simulations and calculations in the field of transmission electron microscopy (TEM). Several thickness-determination techniques exist, e.g. based on plasmon losses in electron energy loss spectra, convergent-beam electron diffraction, or exploitation of thickness contours in images acquired under two-beam diffraction conditions. However, the accuracy, precision, and time consumption differs significantly and often yields thickness values only for a small sample region. We will show in this work that scanning transmission electron microscopy (STEM) in a scanning electron microscope (STEM-in-SEM) is well suited for thickness determination with rather satisfying accuracy (error within a few percent). This technique has been further elaborated by us after previous initial work. We will give an in-depth instruction and discussion of the technique so that users can avoid pitfalls.