Published in
Institute of Electrical and Electronics Engineers, IEEE Transactions on Electron Devices, 12(70), p. 6651-6657, 2023
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Back-End-of-Line-Compatible Scaled InGaZnO Transistors by Atomic Layer Deposition
Journal article published in 2023 by
Jie Zhang 
,
Zehao Lin ,
Zhuocheng Zhang ,
Ke Xu ,
Hongyi Dou,
Bo Yang,
Adam Charnas ,
Dongqi Zheng ,
Xinghang Zhang,
Haiyan Wang,
Peide D. Ye
,
Zehao Lin ,
Zhuocheng Zhang ,
Ke Xu ,
Hongyi Dou,
Bo Yang,
Adam Charnas ,
Dongqi Zheng ,
Xinghang Zhang,
Haiyan Wang,
Peide D. Ye
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