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Area-Selective (Inhibited) Atomic Layer Deposition of ZnO on Si/SiO<sub>2</sub> Using Tris(trimethylamino)methylsilane

Published in 2023 by Behnam Moeini ORCID, Tahereh Avval, Hidde Brongersma, Stanislav Průša, Pavel Bábík, Elena Vaníčková, Brian R. Strohmeier, David S. Bell, Dennis Eggett, Steven M. George, Matthew R. Linford
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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