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Behnam Moeini
Moeini et al., 2023
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@misc{Moeini2023, author = {Moeini, Behnam and Avval, Tahereh and Brongersma, Hidde and Průša, Stanislav and Bábík, Pavel and Vaníčková, Elena and Strohmeier, Brian R. and Bell, David S. and Eggett, Dennis and George, Steven M. and Linford, Matthew R.}, month = {may}, title = {Area-Selective (Inhibited) Atomic Layer Deposition of ZnO on Si/SiO<sub>2</sub> Using Tris(trimethylamino)methylsilane}, year = {2023} }
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Area-Selective (Inhibited) Atomic Layer Deposition of ZnO on Si/SiO<sub>2</sub> Using Tris(trimethylamino)methylsilane
Published in 2023 by
Behnam Moeini
,
Tahereh Avval
,
Hidde Brongersma
,
Stanislav Průša
,
Pavel Bábík
,
Elena Vaníčková
,
Brian R. Strohmeier
,
David S. Bell
,
Dennis Eggett
,
Steven M. George
,
Matthew R. Linford
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