Migration of ion implanted hydrogen in amorphous and polycrystalline Si(3)N(4): H films: Experiments and numerical Simulations
Journal article published in 2005 by
H. Schmidt 
,
G. Borchardt,
M. Danielewski,
R. Filipek,
R. Kozubs,
W. Kucza,
P. Zieba,
Z. Zurek
,
G. Borchardt,
M. Danielewski,
R. Filipek,
R. Kozubs,
W. Kucza,
P. Zieba,
Z. Zurek
