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Published in

Royal Society of Chemistry, RSC Advances, 22(14), p. 15220-15231, 2024

DOI: 10.1039/d4ra00396a

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Microstructure and physical properties of black-aluminum antireflective films

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

The microstructure and physical properties of reflective and black aluminum were compared for layers of different thicknesses deposited by magnetron sputtering on fused silica substrates.