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Formation of a Si--Si3N4 nanocomposite from plasma enhanced chemical vapour deposition multilayer structures

Journal article published in 2008 by G. Scardera, E. Bellet-Amalric, D. Bellet ORCID, T. Puzzer, E. Pink, G. Conibeer
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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