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Dissemin
Daniel Bellet
Dubreuil et al., 2010
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@article{Dubreuil2010, author = {Dubreuil, Olivier and Caubet-Hilloutou, Véronique and Guillan, Julie and Haxaire, Katia and Mellier, Maxime and Caubet, Pierre and Vannier, Patricia and Petitprez, Emmanuel and Bellet, Daniel and Normandon, Ph}, month = {jan}, title = {Characterization and impact of reduced copper plating overburden on 45 nm interconnect performances}, year = {2010} }
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Characterization and impact of reduced copper plating overburden on 45 nm interconnect performances
Journal article published in 2010 by
Olivier Dubreuil
,
Véronique Caubet-Hilloutou
,
Julie Guillan
,
Katia Haxaire
,
Maxime Mellier
,
Pierre Caubet
,
Patricia Vannier
,
Emmanuel Petitprez
,
Daniel Bellet
,
Ph Normandon
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