Use of computational fluid Dynamics simulations to tune the deposition regime in close-proximity spatial atomic layer deposition
Proceedings article published in 2018 by
César Masse de La Huerta,
Viet Nguyen,
Pedro Brandao Veiga,
Jean-Marc Dedulle,
Daniel Bellet 
,
Carmen Jiménez,
David Muñoz-Rojas
,
Carmen Jiménez,
David Muñoz-Rojas
