Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuit
Journal article published in 2023 by
Zhichao Ye,
Haiyan Jia,
Zhangjun Huang,
Chen Shen,
Jinbao Long,
Baoqi Shi,
Yi-Han Luo,
Lan Gao,
Wei Sun,
Hairun Guo,
Jijun He,
Junqiu Liu 
