Top-down Nanofabrication of Single-Ion Implanted Silicon Quantum Computer Devices
Proceedings article published in 2002 by
F. Stanley,
E. Gauja,
K. Peceros,
L. Macks,
J. Szymanska,
T. Buehler,
R. McKinnon,
V. Chan,
M. Mitic,
A. Dzurak,
R. Clark,
C. Yang,
Christopher Pakes 
,
J. McCallum,
D. Jamieson
and other authors.
,
J. McCallum,
D. Jamieson
and other authors.
