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Abstract We use CEERS JWST/NIRCam imaging to measure rest-frame near-IR light profiles of 435 M ⋆ > 1010 M ⊙ galaxies in the redshift range of 0.5 < z < 2.3. We compare the resulting rest-frame 1.5–2 μm half-light radii (R NIR) with stellar half-mass radii ( R M ⋆ ) derived with multicolor light profiles from CANDELS Hubble Space Telescope imaging. In general agreement with previous work, we find that R NIR and R M ⋆ are up to 40% smaller than the rest-frame optical half-light radius R opt. The agreement between R NIR and R M ⋆ is excellent, with a negligible systematic offset (<0.03 dex) up to z = 2 for quiescent galaxies and up to z = 1.5 for star-forming galaxies. We also deproject the profiles to estimate R M ⋆ , 3 D , the radius of a sphere containing 50% of the stellar mass. We present the R−M ⋆ distribution of galaxies at 0.5 < z < 1.5, comparing R opt, R M ⋆ , and R M ⋆ , 3 D . The slope is significantly flatter for R M ⋆ and R M ⋆ , 3 D compared to R opt, mostly due to downward shifts in size for massive star-forming galaxies, while R M ⋆ and R M ⋆ , 3 D do not show markedly different trends. Finally, we show rapid evolution of the size (R ∝ (1 + z)−1.7±0.1) of massive (M ⋆ > 1011 M ⊙) quiescent galaxies between z = 0.5 and z = 2.3, again comparing R opt, R M ⋆ , and R M ⋆ , 3 D . We conclude that the main tenets of the evolution of the size narrative established over the past 20 yr, based on rest-frame optical light profile analysis, still hold in the era of JWST/NIRCam observations in the rest-frame near-IR.