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Jorge Kittl
Kittl et al., 2003
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@incollection{Kittl2003, author = {Kittl, J. A. and Lauwers, A. and Chamirian, O. and Van Dal, M. and Akheyar, A. and Richard, O. and Lisoni, J. G. and De Potter, M. and Lindsay, R. and Maex, K.}, month = {jan}, title = {Silicides for 65 nm CMOS and beyond}, year = {2003} }
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Silicides for 65 nm CMOS and beyond
Book chapter published in 2003 by
J. A. Kittl
,
A. Lauwers
,
O. Chamirian
,
M. Van Dal
,
A. Akheyar
,
O. Richard
,
J. G. Lisoni
,
M. De Potter
,
R. Lindsay
,
K. Maex
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