Dissemin is shutting down on January 1st, 2025

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Zenodo, 2023

DOI: 10.5281/zenodo.7962131

2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM), 2023

DOI: 10.1109/iitc/mam57687.2023.10154676

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Multi-scale simulation of epitaxial processes

Journal article published in 2023 by Linda Jäckel ORCID, Andreas Zienert, Erik E. Lorenz, Max Huber, Jörg Schuster
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Poster presented at the 26th edition of IITC (International Interconnect Technology Conference) as a joint event with MAM (Materials for Advanced Metallization Conference) in Dresden, Germany on 23 May 2023.