Dissemin is shutting down on January 1st, 2025

Links

Tools

Export citation

Search in Google Scholar

Pulse current electrochemical deposition of Copper for through silicon vias in MEMS: Experiment and simulation,Elektrochemische Pulsstromabscheidung von Kupfer für Si-Durchkontakte in MEMS: Experiment und Simulation

Proceedings article published in 2017 by L. Hofmann, A. Zienert, J. Schuster ORCID, S. E. Schulz
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

Full text: Unavailable

Question mark in circle
Preprint: policy unknown
Upload
Question mark in circle
Postprint: policy unknown
Upload
Question mark in circle
Published version: policy unknown
Upload