Published in

American Institute of Physics, Applied Physics Letters, 9(123), 2023

DOI: 10.1063/5.0155968

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Direct-write projection lithography of quantum dot micropillar single photon sources

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

We have developed a process to mass-produce quantum dot micropillar cavities using direct-write lithography. This technique allows us to achieve mass patterning of high-aspect ratio pillars with vertical, smooth sidewalls maintaining a high quality factor for diameters below 2.0 μm. Encapsulating the cavities in a thin layer of oxide (Ta2O5) prevents oxidation in the atmosphere, preserving the optical properties of the cavity over months of ambient exposure. We confirm that single dots in the cavities can be deterministically excited to create high-purity indistinguishable single photons with interference visibility (0.941 ± 0.008).