Published in

American Institute of Physics, Applied Physics Letters, 24(122), 2023

DOI: 10.1063/5.0152962

Links

Tools

Export citation

Search in Google Scholar

Unintentional p-type conductivity in intrinsic Ge-rich SiGe/Ge heterostructures grown on Si(001)

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

Full text: Unavailable

Green circle
Preprint: archiving allowed
Green circle
Postprint: archiving allowed
Orange circle
Published version: archiving restricted
Data provided by SHERPA/RoMEO

Abstract

In this work, we investigate the effective background charge density in intrinsic Si0.06Ge0.94/Ge plastically relaxed heterostructures deposited on Si(001). Hall effect measurements and capacitance–voltage profiling reveal a p-type conductivity in the nominally intrinsic layer with a hole concentration in the mid 1015 cm−3 range at temperatures between 50 and 200 K. In view of the carrier freeze out that we observe below 50 K, we attribute the origin of these carriers to the ionization of shallow acceptor-like defect states above the valence band. In addition, one dominant hole trap located at mid-gap position is found by deep level transient spectroscopy. Carrier trapping kinetics measurements can be interpreted as due to a combination of point defects, likely trapped in the strain field of extended defects, i.e., the threading dislocation.