CMOS-foundry-based blue and violet photonics
Journal article published in 2021 by
Theodore J. Morin,
Lin Chang,
Warren Jin 
,
Chenlei Li,
Joel Guo ,
Hyundai Park,
Minh A. Tran,
Tin Komljenovic,
John E. Bowers
,
Chenlei Li,
Joel Guo ,
Hyundai Park,
Minh A. Tran,
Tin Komljenovic,
John E. Bowers
This paper is made freely available by the publisher.
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Abstract
We demonstrate a CMOS-foundry-based S i 3 N 4 photonic platform at blue and violet wavelengths that exhibits record-high intrinsic Qs of around 6 M at 453 nm and < 1 d B / c m waveguide propagation loss of around 405 nm.