IOP Publishing, Journal of Micromechanics and Microengineering, 6(18), p. 064008, 2008
DOI: 10.1088/0960-1317/18/6/064008
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This paper describes the fabrication process of thermoelectric microconverters, based on n-type bismuth telluride (Bi2Te3) and p-type antimony telluride (Sb2Te3) thin films. Materials are fabricated by thermal co-evaporation with thermoelectric properties comparable to those reported for the same materials in bulk form (used in conventional macro-scale Peltier modules). Absolute value of Seebeck coefficient in the range 150-250 μVK-1 and in-plane electrical resistivity of 7-15 μΩm were obtained. Influence of fabrication parameters on thermoelectric properties is reported. The films were then patterned by photolithography and wet-etching techniques, using HNO3/HCl based etchants. Influence of composition and concentration of etchants in the process is reported. A microcooler was fabricated and analysed by infrared thermal image