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Elsevier, Sensors and Actuators A: Physical, (145-146), p. 75-80

DOI: 10.1016/j.sna.2007.10.062

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

DOI: 10.1109/sensor.2007.4300599

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On-chip array of thermoelectric peltier microcoolers

Journal article published in 2007 by L. M. Gonçalves, J. G. Rocha, Carlos Couto, P. Alpuim ORCID, J. H. Correia, S. Lanceros-Méndez
This paper is available in a repository.
This paper is available in a repository.

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Abstract

This article reports on the theoretical modelling, the finite element modelling (FEM) simulation, the fabrication process and preliminary results of the first on-chip thermoelectric microcooler array (64 pixels arranged in an 8 × 8 array), with each pixel independently controlled. This microcooler array uses co-evaporated V–VI compounds of Bi 2 Te 3 and Sb 2 Te 3 as thermoelectric layers, and can be fabricated using planar thin-film technology, lithography and wet etching, on top of a silicon wafer where the CMOS electronic circuits were previously made.