Published in
Institute of Electrical and Electronics Engineers, IEEE Transactions on Electron Devices, 6(68), p. 2604-2610, 2021
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Vertical Sandwich GAA FETs With Self-Aligned High-k Metal Gate Made by Quasi Atomic Layer Etching Process
Journal article published in 2021 by
Yongkui Zhang 
,
Xuezheng Ai,
Xiaogen Yin ,
Huilong Zhu,
H. Yang ,
G. L. Wang,
J. J. Li,
A. Y. Du ,
C. Li,
W. X. Huang ,
L. Xie ,
Y. Y. Li ,
Y. B. Liu,
Y. B. Zhang,
K. P. Jia
and other authors.
,
Xuezheng Ai,
Xiaogen Yin ,
Huilong Zhu,
H. Yang ,
G. L. Wang,
J. J. Li,
A. Y. Du ,
C. Li,
W. X. Huang ,
L. Xie ,
Y. Y. Li ,
Y. B. Liu,
Y. B. Zhang,
K. P. Jia
and other authors.
This paper was not found in any repository, but could be made available legally by the author.
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