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Institute of Electrical and Electronics Engineers, Journal of Microelectromechanical Systems, 4(30), p. 589-596, 2021

DOI: 10.1109/jmems.2021.3074385

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A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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