Polycrystalline Ge Nanosheets Embedded in Metal‐Semiconductor Heterostructures Enabling Wafer‐Scale 3D Integration of Ge Nanodevices with Self‐Aligned Al Contacts
Journal article published in 2021 by
Masiar Sistani 
,
Raphael Böckle,
Lukas Wind,
Kilian Eysin,
Xavier Maeder ,
Peter Schweizer ,
Johann Michler ,
Alois Lugstein ,
Walter M. Weber
,
Raphael Böckle,
Lukas Wind,
Kilian Eysin,
Xavier Maeder ,
Peter Schweizer ,
Johann Michler ,
Alois Lugstein ,
Walter M. Weber
This paper is made freely available by the publisher.
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